Component comprising submicron hollow spaces

Details Component comprising submicron hollow spaces Component comprising submicron hollow spaces

2006-04-11

2006-04-11

Xu, Ling (Department: 1775)

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Composite having voids in a component

C428S304400, C428S314200, C428S314800, C428S315700, C428S315900, C428S457000, C428S913000, C359S486010, C427S248100

Reexamination Certificate

active

07026046

ABSTRACT:
An optical component or an analytical platform includes a substrate, an array of microstructures on the substrate and microchannels formed by side walls of adjacent microstructures, a width of the microchannels varies as a function of distance to the substrate, the width continuously decreasing with increasing distance from the substrate within at least one distance-interval. In a method for producing such a component or such a platform a substrate with an array of surface microstructures is coated in a vapor treatment in such a way that shadowing effects of the coating mechanism narrow at least partially a width of the upper parts of side walls of the microstructures thereby forming at least partially embedded microchannels.

REFERENCES:
patent: 6884500 (2005-04-01), Edlinger et al.
patent: 11-014814 (1999-01-01), None

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