Component and method for its manufacture

Details Component and method for its manufacture Component and method for its manufacture

2011-08-09

2011-08-09

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Combined

C438S048000, C257S415000

Reexamination Certificate

active

07992442

ABSTRACT:
A method for reducing microcrack formation and crack growth in the glass carrier of a component having a micromechanical sensor element that is bonded to the glass carrier. The upper side of the glass carrier acts as a bonding surface for the sensor element. The rear side of the glass carrier, situated opposite the upper side, acts as a mounting surface for the component, and the glass carrier has side surfaces that connect the upper side and the rear side. In particular, the glass carrier is formed by a segment of a glass wafer into which at least the contours of the glass carrier have been stamped, so that at least the areas produced in this way of the side surfaces of the glass carrier and the rear side of the glass carrier form a surface that is largely closed and free of microcracks.

REFERENCES:
patent: 5273939 (1993-12-01), Becker et al.
patent: 2004/0016995 (2004-01-01), Kuo et al.
patent: 2004/0183149 (2004-09-01), Schenk
patent: 2009/0084182 (2009-04-01), Muchow et al.
patent: 2009/0097087 (2009-04-01), Wolter et al.
patent: 2009/0127640 (2009-05-01), Benzel et al.

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