Compliant motion servo

Metal fusion bonding – Process – With condition responsive – program – or timing control

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Details

228105, 228 11, 228 45, 228 9, 219 8518, 219 5621, 219 5622, B23K 2010

Patent

active

048178489

ABSTRACT:
An automatic ultrasonic wire bonder employs a compliant motion servo (17, 119, 239, 200) on its Z axis drive to maintain a known, constant and steady force applied by the bonding tool (13) to the wire. The tool is resiliently mounted to a carriage (15) that is driven by a force control servo (17, 119, 238, 200). During bonding, the tool is pressed against the wire, and effects of variations in tool tip Z axis position caused by vibration, wire deformation during bonding and other factors of the equipment are minimized by a servo that precisely controls and maintains a fixed position of the carriage relative to the wire to thereby maintain a preselected force between the bonding tool tip and the wire.

REFERENCES:
patent: 4444349 (1984-04-01), Bilane et al.
patent: 4571688 (1986-02-01), Kashihara et al.
patent: 4597519 (1986-07-01), Kurtz et al.
patent: 4598853 (1986-07-01), Hill
patent: 4603802 (1986-08-01), Kurtz et al.
patent: 4718591 (1988-01-01), Hill

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