Plastic article or earthenware shaping or treating: apparatus – Means applying electrical or wave energy directly to work – Radiated energy
Reexamination Certificate
2006-11-28
2006-11-28
Gupta, Yogendra N. (Department: 1722)
Plastic article or earthenware shaping or treating: apparatus
Means applying electrical or wave energy directly to work
Radiated energy
C425S352000, C425S363000, C425S408000
Reexamination Certificate
active
07140861
ABSTRACT:
A compliant UV imprint lithography template, which may also act as a thermal implant template, and methods for manufacturing it. The template essentially comprises a relief image and an elastomer adapted to adjust the relief image. In an embodiment, the relief image is arranged in a compliant imprinting layer where the elastomer is arranged between the imprinting layer and a rigid transparent substrate. In an embodiment, the template is compliant to a wafer surface. In an embodiment, layering an elastomer and an imprinting layer on a substrate and patterning a relief image into the imprinting layer, form the template.
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Sreenivasan Sidlgata V.
Voisin Ronald D.
Watts Michael P. C.
Brooks Kenneth C.
Carter Michael D.
Gupta Yogendra N.
Molecular Imprints, Inc.
Nguyen Thu Khanh T.
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