Compliant diaphragm material

Stock material or miscellaneous articles – Structurally defined web or sheet – Including aperture

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Details

92103SD, 92103M, 428421, 428422, 428458, 428461, 428462, 428624, B32B 310, B32B 1508, B32B 2706, F16J 302

Patent

active

048370681

ABSTRACT:
A compliant sealing material with low or no gas permeability and low spring rate is made by coating a metal such as gold, on the surface of a polymer sheet. The metal acts as a complete gas barrier on an atomic level, and the polymer provides structural integrity and mounting attributes without detrimentally increasing compliance. A small number of metal atoms injected at a moderate energy into the near surface of the polymer act as link sites for joining subsequent lower energy atoms forming an impermeable layer. The total heat delivery to the polymer is minimized thereby preserving integrity and continuity. The material is particularly useful in micromechanical devices where high flexibility is needed with complete sealing.

REFERENCES:
patent: 4510208 (1985-04-01), Kurfman
patent: 4670334 (1987-06-01), Fujiwara et al.
patent: 4671985 (1987-06-01), Rodrigues et al.

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