Compliant chuck for semiconducting device testing and...

Details Compliant chuck for semiconducting device testing and... Compliant chuck for semiconducting device testing and...

2011-01-25

2011-01-25

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S765010, C324S1540PB

Reexamination Certificate

active

07876116

ABSTRACT:
A compliant chuck has a top base assembly, a bottom bracket assembly, a contact plate, a sensor device, a thermoelectric cooling module and a heat-dissipating module. The bottom bracket assembly has a center opening. The contact plate is disposed between the top base assembly and the bottom bracket assembly and has a protrusion corresponding to the center opening and having a mounting hole and an adsorbing hole. The sensor device is mounted in the mounting hole. The thermoelectric cooling module is attached to a top surface of the contact plate. The heat-dissipating module is mounted on the thermoelectric cooling module and cooperates with a chiller to dissipate heat. The compliant chuck uses the sensor device to sense surface temperature of a semiconducting device during testing the semiconducting device so as to compensate the temperature by controlling current into the thermoelectric cooling module.

REFERENCES:
patent: 6162066 (2000-12-01), Glick et al.
patent: 6873169 (2005-03-01), Ham et al.
patent: 2005/0231919 (2005-10-01), Ujike et al.

Affiliated with

Also associated with

Rating

Compliant chuck for semiconducting device testing and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Compliant chuck for semiconducting device testing and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Compliant chuck for semiconducting device testing and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2640443