Complexes having tris (pyrazolyl) borate ligands for forming fil

Details Complexes having tris (pyrazolyl) borate ligands for forming fil Complexes having tris (pyrazolyl) borate ligands for forming fil

1998-08-27

2000-10-03

Nelms, David

Semiconductor device manufacturing: process

Repair or restoration

438602, H01L 2100

Patent

active

061271926

ABSTRACT:
Methods of forming a film on a substrate using chemical vapor deposition techniques and pyrazolyl complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures.

REFERENCES:
patent: 5255258 (1993-10-01), Kawade et al.
patent: 5453494 (1995-09-01), Kirlin et al.
Belderrain et al., "Bis-and Tris(Pyrazolyl)Borate Complexes of the Heavier Alkaline-Earth Elements Ca, Sr and Ba," Polyhedron, 15, 3453-3463 (1996).
Dutremez et al., "HB(3,5-Me.sub.2 pyrazolyl).sub.3 -as an encapsulating ligand for Ba.sup.II," Journal of Organometallic Chemistry, 462,C1-C2 (1993).
Julia et al., "Improved Synthesis of Polyazolylmethanes Under Solid-Liquid Phase-Transfer Catalysis," Organic Preparations and Procedures Inc., 16(5), 299-307 (1984).
Lang et al., "Investigation of the film growth of a new titanium precursor for MOCVD," J. Non-Crystalline Solids, 187, 430-434 (1995).
Macchioni et al., "Cationic Bis-and Tris(.eta.2-(pyrazol-1-y1)methane) Acetyl Complexes of Iron (II) and Ruthenium (II): Synthesis, Characterization, Reactivity, and Interionic Solution Structure by NOESY NMR Spectroscopy," Organometallics, 16, 2139-2145 (1997).
Trofimenko et al., "Boron-Pyrazole Chemistry IV. Carbon-and Boron-Substituted Poly (1-pyrazole) borates," J. Amer. Chem. Soc., 89, 6288-6294 (1967).
Trofimenko et al., "Geminal Poly (1-pyrazolyl) alkalines and Their Coordination Chemistry," J. Amer. Chem. Soc., 92(17), 5118-5127 (1970).
Versteeg et al., "Metalorganic Chemical Vapor Deposition By Pulsed Liquid Injection Using An Ultrasonic Nozzle: Titanium Dioxide on Sapphire from Titanium (IV) Isopropoxide," Journal of the American Ceramic Soc., 78, 2763-2768 (1995).

Affiliated with

Also associated with

Rating

Complexes having tris (pyrazolyl) borate ligands for forming fil does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Complexes having tris (pyrazolyl) borate ligands for forming fil, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Complexes having tris (pyrazolyl) borate ligands for forming fil will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-194452