Complex probe card for testing a semiconductor wafer

Details Complex probe card for testing a semiconductor wafer Complex probe card for testing a semiconductor wafer

1981-05-21

1985-06-11

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158F, G01R 106, G01R 3102

Patent

active

045231443

ABSTRACT:
A probe card includes a printed circuit plate having an aperture at the center thereof and a ring fixed around said aperture on either side of the plate. The ring is adapted to support probe needles in radial arrays with respect to the aperture. Each of the arrays has a multilayer of probe needles which have their terminal tips aligned on a plane in parallel with the plate and their opposite terminal ends connected to the printed circuit for external connection.

REFERENCES:
patent: 3835381 (1974-09-01), Garretson et al.
patent: 3911361 (1975-10-01), Bove et al.

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