Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1996-08-20
1999-07-06
Kincaid, Kristine
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361311, 3613214, H01G 4005, H01G 406
Patent
active
059204532
ABSTRACT:
A ferroelectric capacitor includes a bottom electrode, a top electrode, and a ferroelectric layer located between the top and bottom electrodes that extends to completely encapsulate the top electrode, except for a contact hole to allow metalization of the top electrode. The total encapsulation of the top electrode reduces the sensitivity of the ferroelectric capacitor to hydrogen and thus improves electrical switching performance.
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Chapman, S.P., et al, "Tuning PZT DO Fabrication Processes by Optimizing Imprint", abstract, Ninth International Symposium on Integrated Ferroelectrics, Santa Fe, New Mexico, Mar. 3, 1997.
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Argos, Jr. George
Evans Thomas A.
Dinkins Anthony
Kincaid Kristine
Meza Peter J.
Ramtron International Corporation
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