Complete blade and wafer handling and support system without tap

Details Complete blade and wafer handling and support system without tap Complete blade and wafer handling and support system without tap

1999-03-02

2000-09-05

Scherbel, David A.

Stone working

Sawing

B28D 102

Patent

active

061127353

ABSTRACT:
The wafer handling and support system disclosed herein does not use tape and is adapted for use in conjunction with a number of work stations. The wafer handling and support system includes a chuck plate comprised of a non-porous section surrounding a porous section and a robotic arm for transporting a chuck plate/wafer combination under vacuum. The chuck plate is sized to be carried by a wafer chuck and the porous section of the chuck plate is configured to support a wafer. The wafer may be held in place on the chuck plate by the application of a vacuum.

REFERENCES:
patent: 3711081 (1973-01-01), Cachon
patent: 3823836 (1974-07-01), Cheney et al.
patent: 4183545 (1980-01-01), Daly
patent: 4553069 (1985-11-01), Purser
patent: 4597228 (1986-07-01), Koyama et al.
patent: 4603466 (1986-08-01), Morley
patent: 4603867 (1986-08-01), Babb et al.
patent: 4747608 (1988-05-01), Sato et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 5029418 (1991-07-01), Bull
patent: 5193972 (1993-03-01), Engelbrecht
patent: 5203401 (1993-04-01), Hamburgen et al.
patent: 5324155 (1994-06-01), Goodwin et al.
patent: 5411921 (1995-05-01), Negoro
patent: 5634267 (1997-06-01), Farnworth et al.
patent: 5649854 (1997-07-01), Gill, Jr.
patent: 5655954 (1997-08-01), Oishi et al.
patent: 5679055 (1997-10-01), Greene et al.
patent: 5692873 (1997-12-01), Weeks et al.
patent: 5803797 (1998-08-01), Piper
patent: 5809987 (1998-09-01), Wark et al.

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