Complementary masks and method of fabrication of same,...

Details Complementary masks and method of fabrication of same,... Complementary masks and method of fabrication of same,...

2006-02-14

2006-02-14

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S030000, C430S296000, C430S942000

Reexamination Certificate

active

06998201

ABSTRACT:
A complementary mask has a plurality of pattern forming regions34a, 34having arranged on them complementary patterns26, 28obtained by dividing first circuit patterns into complementary patterns26, 28complementary with each other and formed by openings. The complementary patterns26, 28are arranged in the pattern forming regions34a, 34bso that pattern densities of the pattern forming regions34a, 34bbecome substantially the same.

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