Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate
2006-07-11
2006-07-11
Dunn, Drew A. (Department: 2872)
Optical: systems and elements
Polarization without modulation
By relatively adjustable superimposed or in series polarizers
C359S494010, C359S490020, C359S351000, C359S352000, C359S355000
Reexamination Certificate
active
07075721
ABSTRACT:
A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.
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Bruning John H.
Webb James E.
Corning Incorporated
Dunn Drew A.
Pritchett Joshua L.
Schaeberle Timothy M
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