Compensator for radially symmetric birefringence

Details Compensator for radially symmetric birefringence Compensator for radially symmetric birefringence

2006-07-11

2006-07-11

Dunn, Drew A. (Department: 2872)

Optical: systems and elements

Polarization without modulation

By relatively adjustable superimposed or in series polarizers

C359S494010, C359S490020, C359S351000, C359S352000, C359S355000

Reexamination Certificate

active

07075721

ABSTRACT:
A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.

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patent: WO 00/75697 (2000-12-01), None
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