Compensating for cable drag forces in high precision stages

Details Compensating for cable drag forces in high precision stages Compensating for cable drag forces in high precision stages

2005-08-30

2005-08-30

Knight, Anthony (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Digital positioning

C700S001000, C700S056000, C700S121000

Reexamination Certificate

active

06937911

ABSTRACT:
A positioning system is disclosed. The positioning system includes a movable stage. The positioning system also includes a cable carrier movable relative to the stage. The cable carrier is configured for carrying a cable so as to prevent cable drag forces from acting on the stage.

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