Compensated servo control stage positioning apparatus

Details Compensated servo control stage positioning apparatus Compensated servo control stage positioning apparatus

1994-12-22

1996-08-20

Sircus, Brian

Electricity: motive power systems

Positional servo systems

Program- or pattern-controlled systems

318625, 318632, 74480R, G05D 1108

Patent

active

055481957

ABSTRACT:
A stage positioning apparatus including a stage and a servo control system. The servo control system includes a compensation circuit. The compensation circuit determines the cosine of the angle between the off-axis drive bar and the direction of travel. A voltage, proportional to the cosine, is multiplied by the on-axis drive error signal to develop an off-axis compensation voltage. Each drive's new error signal is compensated by its respective off-axis compensation voltage.

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