Electrical resistors – Resistance value responsive to a condition – Fluid- or gas pressure-actuated
Patent
1998-03-25
1999-12-07
Gellner, Michael L.
Electrical resistors
Resistance value responsive to a condition
Fluid- or gas pressure-actuated
338 4, 338 36, H01C 1010
Patent
active
059990821
ABSTRACT:
A pressure transducer employing a metal isolation diaphragm. A volume of oil is located between the metal diaphragm and a silicon sensor received in a base member. In order to reduce errors at very low pressure caused by the oil exerting a tension on the deflecting portion of said silicon sensor, the metal diaphragm has an extending dome or dimple above the location of the silicon sensor. The silicon sensor is also recessed below the supporting base plate so that the separation between the silicon sensor and the metal diaphragm increases. The base plate also contains a series of shallow, narrow concentric grooves which further reduces surface tension between the metal diaphragm and the base plate.
REFERENCES:
patent: 3909924 (1975-10-01), Vindasius et al.
patent: 4379279 (1983-04-01), Nasiri
Young, Hugh D., (University Physics, Chapter 14--"Fluid Mechanics"), pp. 392 and 393, Eighth edition. No Date.
DeRosa Lou
Gardner Robert
Geras Leo
Hayer John R.
Kurtz Anthony D.
Gellner Michael L.
Kulite Semiconductor Products Inc.
Lee Richard
Plevy Arthur L.
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