Electric heating – Heating devices – With heater-unit housing – casing – or support means
Patent
1993-05-19
1994-07-12
Reynolds, Bruce A.
Electric heating
Heating devices
With heater-unit housing, casing, or support means
219459, 219462, 118725, 118500, H01L 2120, H05B 300
Patent
active
053290976
ABSTRACT:
A compact heater is designed for the deposition of thin films at high temperatures in an oxidizing atmosphere or in vacuum. The heater is designed to accommodate a small-diameter load-lock system in an ultra-high-vacuum deposition chamber, and can operate in 0 to 1 atmosphere of oxygen up to at least 800.degree. C. The compact design allows the heater, including a substantially isothermal substrate holder having the substrate affixed thereto, included temperature sensor and attached main body portion, to be loaded through a load-lock port with about a 2.5 inch inside diameter. Heat is generated resistively, and the substrates are heated directly by thermal conduction. The heater was designed specifically to heat substrates to precisely monitored temperatures during the growth of high-temperature superconducting thin films.
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"Heater for High T.sub.c Oxide Superconducting Thin-Film Deposition", B. Oh et al., IBM Research Div., New York, Rev. Sci. Instrum. 62(12), Dec. 1991.
Briggs J. Scott
Jones Thomas E.
McGinnis Wayne C.
Fendelman Harvey
Jeffery John A.
Keough Thomas Glenn
Reynolds Bruce A.
The United States of America as represented by the Secretary of
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