Compact specimen processing station

Details Compact specimen processing station Compact specimen processing station

1991-03-19

1995-08-29

Dzierzynski, Paul M.

Optical: systems and elements

Compound lens system

Microscope

359391, G02B 2126

Patent

active

054465842

ABSTRACT:
The present invention is a compact specimen processing station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26, 28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). A specimen processing station (10) that performs inspection functions is equipped with a processing means (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.

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Pieter Burggraaf, "Auto Wafer Inspection Tools for Your Process Problems" Semiconductor International, (Dec. 1988).

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