Compact specimen inspection station

Details Compact specimen inspection station Compact specimen inspection station

1994-07-18

1997-07-08

Nguyen, Thong

Optical: systems and elements

Compound lens system

Microscope

359391, G02B 2126

Patent

active

056467761

ABSTRACT:
The present invention is a compact specimen inspection station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26,28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). The station is also equipped with a microscope (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.

REFERENCES:
patent: 3976330 (1976-08-01), Babinski et al.
patent: 4526802 (1985-07-01), Sato
patent: 4784481 (1988-11-01), Wuerfel
patent: 4818169 (1989-04-01), Schram et al.
patent: 5331458 (1994-07-01), Bacchi et al.

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