Optical: systems and elements – Compound lens system – Microscope
Patent
1989-09-11
1994-07-19
Sugarman, Scott I.
Optical: systems and elements
Compound lens system
Microscope
359391, G02B 2126
Patent
active
053314581
ABSTRACT:
The present invention is a compact specimen inspection station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26,28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). The station is also equipped with a microscope (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.
REFERENCES:
patent: 4680061 (1987-07-01), Lamont, Jr.
patent: 4784481 (1988-11-01), Wuerfel
patent: 4886412 (1989-12-01), Wooding et al.
Reference Form PLO 52586 Optical Specialties, Inc.
References by Nikon (Oct. 1984-Apr. 1987).
Reference publication No. 831011 by Leitz (Jan. 1985).
Reference FN: WPD003 by KLA Instruments Corporation (Dec. 12, 1988).
Pieter Burggraaf, "Auto Wafer Inspection Tools for Your Process Problems" Semiconductor International (Dec. 1988).
Kensington Wafer Handler, Specification Sheet, Kensington Laboratories, Inc., 750 National Court, Richmond, CA 94804.
Bacchi Paul E.
Filipski Paul S.
Kensington Laboratories, Inc.
Nguyen Thong
Sugarman Scott I.
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