Compact shearing wavefront sensor and method

Details Compact shearing wavefront sensor and method Compact shearing wavefront sensor and method

1998-02-04

2000-05-02

Kim, Robert H.

Optics: measuring and testing

Lamp beam direction or pattern

356354, 250201, G01J 120

Patent

active

060579137

ABSTRACT:
A compact wavefront sensor includes an array of microlenses supported above a microchip. The microchip includes an array of gratings and photodetectors, which correspond to a particular microlens. Light incident on a grating will be diffracted back towards the array of microlenses, where it is focussed onto a corresponding photodetector. The photodetector receives light from gratings adjacent thereto, and detects a resulting interference therebetween. The detected interference is then used to reconstruct the wavefront. The detected interference can also be used to correct wavefronts by controlling a modulating element reflecting the wavefront.

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