Compact semiconductor device including a thin film capacitor of

Details Compact semiconductor device including a thin film capacitor of Compact semiconductor device including a thin film capacitor of

1993-06-08

1996-07-23

Walberg, Teresa J.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613211, 361329, 361330, 257532, H01G 433

Patent

active

055396135

ABSTRACT:
In a semiconductor device which has a substrate, at least one thin film capacitor having a lower electrode layer deposited on the substrate, a dielectric layer overlaid on the lower electrode layer, and an upper electrode layer stacked on the dielectric layer, the lower electrode layer is surrounded by an insulator layer of Si.sub.3 N.sub.4.

REFERENCES:
patent: 5046043 (1991-09-01), Miller et al.
patent: 5198384 (1993-03-01), Dennison
patent: 5206788 (1993-04-01), Larson et al.
patent: 5212620 (1993-05-01), Evans, Jr. et al.
patent: 5227855 (1993-07-01), Momose
patent: 5303182 (1994-04-01), Nakao et al.
patent: 5335138 (1994-08-01), Sandhu et al.
"3-Dimensional Stacked Capacitor Cell For 16M and 64M DRAMS" by EMA et al., MOS Division, Fujitsu Limited, Kawasaki, Japan, 1988 IEEE, pp. 592-595.
IEDM, Dec. 1991, pp. 32.1.1-32.1.4, "A stacked capacitor with (Ba.sub.x Sr.sub.1-x)TiO.sub.3 for 256M DRAM" by Koyama et al.

Affiliated with

Also associated with

Rating

Compact semiconductor device including a thin film capacitor of does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Compact semiconductor device including a thin film capacitor of , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Compact semiconductor device including a thin film capacitor of will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-718198