Refrigeration – Using electrical or magnetic effect – Thermoelectric; e.g. – peltier effect
Patent
1995-10-06
1997-03-25
Doerrler, William
Refrigeration
Using electrical or magnetic effect
Thermoelectric; e.g., peltier effect
62430, F25B 2102, F25D 1100
Patent
active
056133642
ABSTRACT:
A compact replaceable temperature control module for use with semiconductor manufacturing equipment and a controller to control an operating temperature of an internal surface in a process chamber of the equipment. The control module includes a housing having a size which permits the housing to be placed in close proximity to the equipment. A circulatory system is carried by the housing and adapted to couple to the equipment for receiving a liquid from the equipment and returning the liquid to the equipment so as to create a closed loop system with the equipment for regulating the operating temperature of the internal surface in the process chamber. The circulatory system includes a thermal electric heat exchanger provided with a hollow core element having a temperature different than the unknown temperature and a pump for causing the liquid to flow through the hollow core element so as to cause the temperature of the liquid to more closely approximate the temperature of the hollow core element. A sensor is provided for sensing the temperature of the liquid received from the equipment. The controller adjusts the temperature of the hollow core element in response to the temperature of the liquid sensed by the sensor.
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Doerrler William
POU, Inc.
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