Compact pulse stretcher

Details Compact pulse stretcher Compact pulse stretcher

2006-08-01

2006-08-01

Perkey, William (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000, C356S447000

Reexamination Certificate

active

07084959

ABSTRACT:
A pulse stretcher includes a first prism and a second prism positioned opposite each other. A first coupling prism is optically coupled to the first prism with a partially reflective interface that directs a beam towards the second prism in a helical path. The first prism and the first coupling prism form a beamsplitter. A recirculating prism (or a reflective element) reflects the beam from the first prism into the second prism. Mirrors are positioned around the first and second prisms to permit recirculation of the beam through the first and second prisms. The beam recirculates through the first and second prisms using two or more helical paths. The pulse stretcher can be incorporated into a lithographic system.

REFERENCES:
patent: 5309456 (1994-05-01), Horton
patent: 6389045 (2002-05-01), Mann et al.
patent: 2005/0259701 (2005-11-01), Albert
patent: 6-214187 (1994-05-01), None
Abstract of Japanese Patent No. 6-214187 (From: Patent Abstracts of Japan, Nov. 7, 1994, Section: P, Section No. 1822, vol. 18, No. 581, p. 91.).

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