Compact pressure-sensing device

Details Compact pressure-sensing device Compact pressure-sensing device

2006-04-10

2009-06-09

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07543502

ABSTRACT:
The invention is a compact sensing device that is capable of measuring the conditions (e,g, pressure, temperature) inside a cylinder of an internal combustion engine. The invention is also a cost-effective method of fabricating the sensing device. The sensing device includes a substrate, a beam, and piezo-resistive sensing elements. The beam, which is formed on the substrate, is capable of deflecting according to different pressures applied to different beam surfaces. The piezo-resistive sensing elements are coupled to the beam and detect beam deflection. The piezo-resistive sensing elements generate an electrical signal corresponding to the beam deflection.

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patent: 7389696 (2008-06-01), Werner
PCT International Search Report dated Jun. 11, 2008 corresponding to the related PCT US06/13332.

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