Compact photo resist dryer

Details Compact photo resist dryer Compact photo resist dryer

1991-10-24

1992-12-01

Nilson, Robert G.

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34202, 219385, 219398, 219407, F27D 1100

Patent

active

051670780

ABSTRACT:
A photo resist drier for curing photo resist coatings on a metal foil is described. The dryer has an enclosure made of copper sheet and surrounded by strip heaters to heat the enclosure. The enclosure, heated by the heaters conducts heat and accordingly results in a more uniform internal temperature in the enclosure. The heaters are individually controllable. The vapors are captured by an exhaust system and removed from the dryer.

REFERENCES:
patent: 3052040 (1962-09-01), Falanga et al.
patent: 3074342 (1963-01-01), Wachtel
patent: 3412234 (1968-11-01), Otavka
patent: 3800123 (1974-03-01), Maahs
patent: 4238669 (1980-12-01), Huntley
patent: 4298789 (1981-11-01), Eichelberger
patent: 4554437 (1985-11-01), Wagner et al.

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