Compact multi-axis interferometer

Details Compact multi-axis interferometer Compact multi-axis interferometer

2007-05-29

2007-05-29

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S500000

Reexamination Certificate

active

10360262

ABSTRACT:
A multi-axis plane mirror interferometer uses shared measurement and reference beams that respectively reflect from measurement and reference reflectors before that shared beams are split into individual beams corresponding to the measurement axes of the interferometer. An N-axis interferometer thus requires only N+1 measurement beam paths, one for the shared measurement beam and N for individual measurement beams, to provide for each measurement axis the two reflections that cancel angular misalignment between the measurement and reference reflectors.

REFERENCES:
patent: 4784490 (1988-11-01), Wayne
patent: 4859066 (1989-08-01), Sommargren
patent: 4881816 (1989-11-01), Zanoni
patent: 4883357 (1989-11-01), Zanoni et al.
patent: 5064289 (1991-11-01), Bockman
patent: 5801832 (1998-09-01), Van Den Brink
patent: 6757066 (2004-06-01), Hill
patent: 6806960 (2004-10-01), Bagwell et al.
patent: 2006/0187464 (2006-08-01), Womack et al.
patent: 0281385 (1988-03-01), None
patent: 0469718 (1991-06-01), None
patent: WO 03/004962 (2002-07-01), None

Affiliated with

Also associated with

Rating

Compact multi-axis interferometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Compact multi-axis interferometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Compact multi-axis interferometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3780584