Compact molecular-drag vacuum pump

Details Compact molecular-drag vacuum pump Compact molecular-drag vacuum pump

2005-03-15

2005-03-15

Tyler, Cheryl J. (Department: 3746)

Pumps

Motor driven

Electric or magnetic motor

C417S244000, C417S321000, C417S353000, C417S410100, C417S423500, C417S423700, C417S423140, C417S423100

Reexamination Certificate

active

06866488

ABSTRACT:
A molecular drag vacuum pump for pumping a gas from an inlet to an outlet includes a high-speed spinning disk disposed within a housing. Gas flows through passageways in the housing adjacent the disk, where it comes into contact with surfaces of the spinning disk. Conformable wipers direct the gas to successive stages adjacent the disk. The pump can be powered by an integrated motor, comprising permanent magnets in the disk and cooperating coils in the housing. The pump can include various features, such as ridges on the wipers, seal rings, and regenerative pumping pockets, to reduce leakage and prevent backflow. The housing can have a modular configuration to allow two or more pump modules to be connected and operate in series. Successive modules may be independently or commonly powered, and may counter-rotate.

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