Compact mass spectrometer for plasma discharge ion analysis

Details Compact mass spectrometer for plasma discharge ion analysis Compact mass spectrometer for plasma discharge ion analysis

1995-11-30

1997-07-22

Berman, Jack I.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

250294, 250281, 250282, H01J 4940

Patent

active

056506180

ABSTRACT:
A mass spectrometer and methods for mass spectrometry which are useful in characterizing a plasma. This mass spectrometer for determining type and quantity of ions present in a plasma is simple, compact, and inexpensive. It accomplishes mass analysis in a single step, rather than the usual two-step process comprised of ion extraction followed by mass filtering. Ions are captured by a measuring element placed in a plasma and accelerated by a known applied voltage. Captured ions are bent into near-circular orbits by a magnetic field such that they strike a collector, producing an electric current. Ion orbits vary with applied voltage and proton mass ratio of the ions, so that ion species may be identified. Current flow provides an indication of quantity of ions striking the collector.

REFERENCES:
patent: 4611118 (1986-09-01), Managadze
patent: 5453614 (1995-09-01), La Fontaine et al.
"Composition of the oxygen plasmas from two inductively couple sources", J. Vac. Sci. Technol. A 13(3), May/Jun. 1995, 839-842, M. Tuszewski et al., Los Alamos National Laboratory, Los Alamos, New Mexico.
"Measurement of ion species ratio in the plasma source ion implantation process", J. Appl. Phys. 73(9), 1 May 1993, 4176-4180, B. Y. Tang et al.
"Mass Spectrometric Studies of Positive Ions in R.F. Glow Discharges", Thin Solid Films, 171 (1989) 65-80, J.W. Coburn.
"An omegatron mass spectromete for plasma ion species analysis", Rev. Sci. Instrum. 61 (8), Aug. 1990, 2155-2158, E. Y. Wang et al.

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