Compact manifold valve

Fluid handling – Convertible – Reversible check

Patent

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Details

137606, F16K 2700

Patent

active

049305387

ABSTRACT:
A compact manifold valve for use in gas flow systems includes a manifold body, first and second cartridge holders, first and second operating valves and an outlet port. The manifold body includes valve turrets for mounting the first and second operating valves. Different valves types such as externally pressurized, normally closed bellows or diaphragm valves, externally pressurized, normally open bellows or diaphragm valves, double acting bellows or diaphragm valves, manually operated valves and/or toggle operated valves may be readily interchanged in the manifold valve to accommodate different applications in the gas flow system. The manifold body also includes first and second valve chambers, first and second cartridge ports, and multiple fluid flow pathways fluidically interconnecting the valve chambers, cartridge ports and outlet port. The manifold valve further includes first and second cartridge holders which are configured to be readily mounted in and removed from the manifold body. The cartridge holders are configured for internal seating of filter and/or check valve cartridges depending upon the particular application. The check valve cartridge is configured for reversible seating within the cartridge holder so that, depending upon the particular application, fluid backflow into or out of the manifold valve may be precluded.

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Ohmi, T. et al., Super Clean Room System-Ultra Clean Technology for Submicron LSI Fabrication, Technical Papers on Ultra Clean Tech. Dept. of Electronics, Univ. Sendai 980, Japan, First Intern. Sympo. Phil. PA 5/14/87.

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