Compact Littrow encoder

Details Compact Littrow encoder Compact Littrow encoder

2011-01-04

2011-01-04

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07864336

ABSTRACT:
A Littrow encoder is disclosed. The encoder includes first and second interferometers and a beam splitter assembly that splits a first instrument light beam into first and second interferometer input beams and directs these beams into the first and second interferometers, respectively. Each interferometer generates a measurement beam and a reference beam and directs the measurement beam toward a grating on a surface from which the measurement beam is diffracted, the measurement beam from the first interferometer striking the surface at a Littrow angle that is the negative of the angle at which the measurement beam from the second interferometers strikes that surface. Each interferometer includes at least one intensity detector that generates a signal related to an intensity of light in a combined light beam that includes the reference and measurement beams from that interferometer.

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