Coherent light generators – Particular beam control device – Q-switch
Patent
1984-10-09
1986-12-16
Sikes, William L.
Coherent light generators
Particular beam control device
Q-switch
372 99, 356237, H01S 3111, H01S 3123
Patent
active
046302760
ABSTRACT:
The present invention provides a laser scanning system of compact size and relatively long focal length which may be used in laser surface inspection system for silicon wafers and the like. The scanning system employs a folded optical cell having a pair of reflective surfaces so oriented that the scanning laser beam is folded, and reflects from each of the reflective surfaces several times to significantly increase the focal length. The folded optical cell is also effective to produce a collimated, substantially parallel scan pattern such that the beam remains perpendicular to the inspection surface as it is scanned. The folded optical cell can also be set for divergent or convergent scan.
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Aeronca Electronics, Inc.
Sikes William L.
Wise Robert E.
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