Compact laser interferometer system

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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Details

356349, G01B 902

Patent

active

054001439

ABSTRACT:
An optical interferometer system is described which precisely measures the angle of rotation of a mirrored surface about a desired axis of rotation without sensitivity to rotation of the surface about an axis perpendicular to the desired axis of measurement. Measurements of the angle or position of a surface are made without attaching any optical or other components to the surface. In operation, a laser beam is passed through a beam splitter which provides two secondary beams. Each of the beams is then passed through a respective optical assembly, each of which is essentially a mirror image of the other. Each of the optical assemblies comprises a unique combination and arrangement of optics which provides a folded optical path wherein the laser beam passes through the system optics and is reflected multiple times by the mirror being measured. Each of the beams then passes back through its respective optical section and is detected by optical means. Each section of the optical assembly includes a "mid-path assembly" comprising a penta-prism/right-angle prism optically coupled to a retro-reflector. This mid-path assembly cancels out the effects of any off-axis movement of the surface being measured and provides accurate measurements even when the surface is rotated orthogonally to the plane of rotation of the desired measurement.

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