Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Patent
1997-07-28
1998-09-08
Bowers, Jr., Charles L.
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
438 60, 438 75, 438 76, 438 78, H01L 3118
Patent
active
058044655
ABSTRACT:
By introducing an n-type drain implant substantially below the surface of the p-type substrate of a full frame image sensor, then enclosing the drain on the bottom and the sides with a deep p-type implant, and accumulating the surface with a shallow p-type implant, with all implantations performed through the same mask aperture, the blooming control, channel stop, and dark current suppression features of the imager are compressed, increasing the fill factor, facilitating pixel miniaturization, and therefore enabling high resolution imaging applications.
REFERENCES:
patent: 5114865 (1992-05-01), Kimura
patent: 5118631 (1992-06-01), Dyck et al.
Anagnostopoulos Constantine N.
Banghart Edmund K.
Bowers Jr. Charles L.
Christiansa Keith
Eastman Kodak Company
Leimbach James D.
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