Compact interferometer and use in wavelength monitoring

Optics: measuring and testing – By light interference – Spectroscopy

Reexamination Certificate

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Reexamination Certificate

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06943890

ABSTRACT:
A compact interferometer includes a substrate having opposing faces and a suppression feature on one of the faces of the substrate. The suppression feature suppresses higher order reflections inside the substrate. The suppression feature may be an absorptive coating. The interferometer produces high throughput, high contrast signals when receiving light at normal or near normal incidence.

REFERENCES:
patent: 4536089 (1985-08-01), Siebert
patent: 6081379 (2000-06-01), Austin
patent: 6125220 (2000-09-01), Copner et al.
patent: 6186937 (2001-02-01), Ackerman
patent: 6243200 (2001-06-01), Zhou
patent: 6339474 (2002-01-01), Paiam
patent: 6373620 (2002-04-01), Wang
patent: 2003/0107746 (2003-06-01), Hedin et al.

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