1977-05-06
1979-10-23
Corbin, John K.
350199, G02B 1708
Patent
active
041718704
ABSTRACT:
A compact image projection apparatus comprises a concave spherical mirror, a plano-convex lens, a quarter wave plate and two prisms one of which is a roof prism. The apparatus is such that object and image have the same orientation and are positioned in two parallel planes. The apparatus is located, for example, between a mask and a semiconductor wafer in a scanning projection printing system.
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Wynne, C. G. "A Unit-Power Telescope for Projection Copying", Optical Instruments and Techniques 1969, edited by J. H. Dickson, Oriel Press, England, 1970, pp. 429-434.
Dyson, J. "Unit Magnification Optical System Without Seidel Aberrations", Journal of the Optical Society of America vol. 49, No. 7, Jul. 1959, pp. 713-716.
Bruning John H.
White Alan D.
Bell Telephone Laboratories Incorporated
Canepa Lucian C.
Corbin John K.
DEPicciotto Maurice
Rosenberger R. A.
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