Compact, high resolution optical displacement detector

Details Compact, high resolution optical displacement detector Compact, high resolution optical displacement detector

1992-08-11

1996-07-23

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, G01B 902

Patent

active

055395198

ABSTRACT:
The optical displacement detecting device utilizes an encoder plate 2 mounted displaceably along a given first plane and having thereon a periodic slit pattern 1. A light source 4 is disposed behind the encoder plate 2 to illuminate the slit pattern 1 to form a primary fringe image 3 shifting along the first plane. A lens member 6 is utilized to project the primary fringe image 3 by a given magnification to form a secondary enlarged fringe image 5 shifting along a given second plane. A light receiving unit 8 is fixed in the secondary plane to optically detect the shifting secondary enlarged fringe image 5 through a periodic mask pattern to thereby output an electric signal 7 indicative of a displacement of the encoder plate 2.

REFERENCES:
patent: 4112295 (1978-09-01), Dubik et al.
patent: 4518859 (1985-05-01), Hoshika
patent: 4912322 (1990-03-01), Ichikawa
patent: 4939380 (1990-07-01), Berger et al.
patent: 4956553 (1990-09-01), Matsui
patent: 4998013 (1991-03-01), Epstein et al.
patent: 5155355 (1992-10-01), Kabaya
Oriel Signal Catalog--"Optics and Filters"--vol. III, p. 65, 1984.

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