Coherent light generators – Particular pumping means – Electrical
Patent
1997-05-16
1998-10-06
Scott, Jr., Leon
Coherent light generators
Particular pumping means
Electrical
H01S 3097
Patent
active
058188657
ABSTRACT:
A pre-ionizing system in which the pre-ionizer elements are integral with the cathode insulating plate is provided. The cathode insulating plate includes a recessed region machined into the front surface into which the cathode fits, lying substantially flush with the insulator front surface. The back surface of the insulating plate contains a pair of slots running parallel to the long axis of the cathode. The pre-ionizing rods are located within these slots, the slots having sufficient depth to locate the rods approximately adjacent to the cathode. By maintaining the rods at ground, a capacitor is formed in which the insulating plate material between the rod and the cathode acts as the dielectric material of the capacitor. When a voltage pulse is applied, a capacitive corona discharge is formed which pre-ionizes the gases in the region near the cathode.
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Partlo William Norman
Watson Tom Arthur
Beck David G.
Cymer Inc.
Jr. Leon Scott
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