Compact dual pump

Details Compact dual pump Compact dual pump

1999-08-06

2001-03-27

Freay, Charles G. (Department: 3746)

Pumps

Processes

Reexamination Certificate

active

06206644

ABSTRACT:

REFERENCE TO RELATED APPLICATIONS
This application incorporates by reference U.S. Pat. No. 5,700,401.
FIELD
The present invention relates to a compact dual pump for delivering liquid to an integrated circuit fabrication tool. In particular, the invention can be used in a standard integrated circuit manufacturing facility to save space and provide required liquids to the integrated circuit fabrication tools, resulting in a greater production efficiency of integrated circuits.
BACKGROUND
Liquid pumps are used in the semiconductor manufacturing industry to control the flow of chemicals to semiconductor manufacturing tools. Conventional pumps include those that pneumatically activate a bladder to precisely control the quantity of liquid delivered to the tools. Precise control of the liquid is important because each wafer is very valuable and an incorrect flow of the liquid to the tool can spoil the construction of integrated circuits fabricated on the wafer.
Semiconductor manufacturing facilities are expensive. A modern plant can cost in excess of $3 billion. Consequently, space is critical and every square foot of space in the facility must be allocated to productive equipment. Accordingly, techniques of space reduction are greatly desired because space reduction can result in substantial cost savings. Improving space utilization leads to greater production efficiency which allows the facility to produce more integrated circuits.
While conventional liquid pumps have the accurate flow control necessary for the integrated circuit fabrication process, conventional pumps are bulky, a pump is required for each liquid sought to be delivered to the tools, and the pumps can take up a significant amount of space in the chemical delivery cabinets installed in the semiconductor manufacturing facility.
What is needed is a pump that has a small size and that also provides the ability to precisely pump the required liquid to the tool. A goal of the invention is to overcome the identified limitations and to provide a compact dual pump that can simultaneously and independently pump two liquids to the tool.
SUMMARY
The present invention is directed to a device which results in substantial space reduction by combining two pumps into substantially the space of one conventional pump. Accordingly, the dual pump is able to simultaneously pump two different chemicals independent of one another. Alternately, the second pump can serve as a redundant pump to insure that the liquid is constantly supplied to the integrated circuit fabrication tool. In addition, the dual pump can function as a single pump such that a continuous, non-pulsation flow of liquid is provided.
An exemplary embodiment of a compact dual pump includes a pump body having a first concave depression on a first side of the body. A first fluid inlet port and a first fluid outlet port are contained within the body and are in fluid communication with the first depression. A second concave depression is on a second side of the body opposite the first depression. A second inlet fluid port and a second outlet fluid port are contained within the body and in fluid communication with the second depression.
A first diaphragm is coupled to the first side of the body and encloses the first depression to form a first inner chamber. A second diaphragm is coupled to the second side of the body and encloses the second depression to form a second inner chamber. A shell encloses the body on the first and second sides thereof. The shell defines a first outer chamber with the first diaphragm that is pressure communication with the first inner chamber. The shell also defines a second outer chamber with the second diaphragm that is in pressure communication with the second inner chamber. A first pressure port in the shell provides a first pressure passage to the first outer chamber. A second pressure port in the shell provides a second pressure passage to the second outer chamber.
In another embodiment, the dual pump includes two pairs of bores aligned with the four fluid ports. A pair of check valves are disposed within the first pair of bores and define a first fluid path between the first fluid port and the first inner chamber. A second pair of check valves are disposed with the other pair of bores and define a second fluid path between the second fluid port and the second inner chamber. A pump regulator is connected to the first and second pressure ports and independently provides either pressure or vacuum to the first and second outer chambers to affect fluid movement in the dual pump chambers.
Advantages of the present invention include the ability to simultaneously and independently provide two fluid chambers within a pump that is substantially the same size as conventional single pump.


REFERENCES:
patent: 5240390 (1993-08-01), Kvinge et al.
patent: 5429681 (1995-07-01), Mesenbring
patent: 5458468 (1995-10-01), Ye
patent: 6071090 (2000-06-01), Miki
patent: 6106246 (2000-08-01), Steck et al.
Parker Instrumentation Data Sheet, Parker Hannifin Corporation, “Disk Check Valve: CV-1 Series”, p. 25.
Millipore Corporation Data Sheet, “Wafergard Chemical Dispense Pumps” by Dispense Systems, p. 232.
Millipore Corporation Data Sheet, “Wafergard Chemical Dispense System Controllers” by Dispense Systems, p. 233.
Millipore Corporation Data Sheet, “WCDP Pump; Appendix 3: Parts List of Non-Filter Pump” by Dispense Systems, p. 104.

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