Compact disc spin coater

Details Compact disc spin coater Compact disc spin coater

1995-08-21

1998-09-08

Czaja, Donald E.

Coating apparatus

With means to centrifuge work

118 56, 118500, 118730, 427240, B05C 1102

Patent

active

058039686

ABSTRACT:
An apparatus for the spin coating of substrates including a substrate carrier, a motor for rotating the substrate carrier, and a spinning bowl surrounding the substrate carrier. A lid is also provided in this spin coating apparatus which at least partially covers the spinning bowl for diminishing the escape for fumes into the ambient atmosphere during the spin coating of a substrate carried by the substrate carrier. The lid is also designed for improving the air flow around the substrate carried by the substrate carrier during the spin coating of the substrate.

REFERENCES:
patent: 943407 (1909-12-01), Heimbuecher
patent: 1159198 (1915-11-01), Elliott
patent: 4033288 (1977-07-01), Woellhaf et al.
patent: 4068019 (1978-01-01), Boeckl
patent: 4073262 (1978-02-01), Scheffel et al.
patent: 4086870 (1978-05-01), Canavello et al.
patent: 4113492 (1978-09-01), Sato et al.
patent: 4377245 (1983-03-01), Patty
patent: 4510176 (1985-04-01), Cuthbert et al.
patent: 4528934 (1985-07-01), Muneo
patent: 4550679 (1985-11-01), Pipa et al.
patent: 5009818 (1991-04-01), Arai et al.
patent: 5099469 (1992-03-01), Dobbin et al.
patent: 5270150 (1993-12-01), Oishi et al.
patent: 5344682 (1994-09-01), Mizukuki et al.
patent: 5518134 (1996-05-01), Liu

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