Common-path point-diffraction phase-shifting interferometer

Details Common-path point-diffraction phase-shifting interferometer Common-path point-diffraction phase-shifting interferometer

2007-12-04

2007-12-04

Lyons, Michael A. (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S521000

Reexamination Certificate

active

11501413

ABSTRACT:
A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

REFERENCES:
patent: 4575247 (1986-03-01), Tansey
patent: 4762417 (1988-08-01), Wu et al.
patent: 6304330 (2001-10-01), Millerd et al.
patent: 7106456 (2006-09-01), Cottrell
patent: 2005/0046863 (2005-03-01), Millerd et al.

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