Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-10-31
2006-10-31
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07130059
ABSTRACT:
Frequency-scanning interferometry is applied to common-path interferometers for measuring topographical features of test objects. A reference element located adjacent to a test object functions as both a beamsplitter and a reference surface. A first portion of a measuring beam reflects from the reference surface of the reference element as a reference beam, and a second portion of the measuring beam transmits through the reference element to and from a surface of the test object as an object beam. Both beams are conveyed along a common path to a detector that records a plurality of intensity variations produced by constructive and destructive interference between localized portions of the object and reference beams associated with different transverse coordinates on the test object surface. An illumination frequency of the measuring beam is incrementally modified through a range of different frequencies sufficient to alternate the intensity variations between conditions of constructive and destructive interference, which occur at modulation frequencies sensitive to path length differences between corresponding points on the surfaces of the test object and reference element.
REFERENCES:
patent: 4594003 (1986-06-01), Sommargren
patent: 4832489 (1989-05-01), Wyant et al.
patent: 5319668 (1994-06-01), Luecke
patent: 5473434 (1995-12-01), de Groot
patent: 5502566 (1996-03-01), Ai et al.
patent: 5627363 (1997-05-01), Paxman et al.
patent: 5689337 (1997-11-01), Lamb et al.
patent: 5777742 (1998-07-01), Marron
patent: 5802085 (1998-09-01), Lefevre et al.
patent: 5867512 (1999-02-01), Sacher
patent: 5880841 (1999-03-01), Marron et al.
patent: 5907404 (1999-05-01), Marron et al.
patent: 5909282 (1999-06-01), Kulawiec
patent: 5926277 (1999-07-01), Marron et al.
patent: 6006128 (1999-12-01), Izatt et al.
patent: 6018535 (2000-01-01), Maeda
patent: 6026100 (2000-02-01), Maeda
patent: 6028670 (2000-02-01), Deck
patent: 6359692 (2002-03-01), Groot
patent: 6882432 (2005-04-01), Deck
patent: 6924898 (2005-08-01), Deck
patent: 2002/0109851 (2002-08-01), Deck
patent: 2002/0176091 (2002-11-01), Deck
patent: 2003/0160968 (2003-08-01), Deck
patent: 2003/0164951 (2003-09-01), Deck
“Multiple-wavelength Interferometry With Tunable Source”, R.G. Pilston and G.N. Steinberg, Applied Optics, vol. 8, No. 3, Mar. 1969, pp. 552-556.
“Two-wavelength Interferometry”, D. Malarcara, editor,Optical Shop Testing, New York, Wiley, 1978, pp. 397-402.
“Multiple-wavelength Phase-shifting Interferometry”, Y. Cheng and J.C. Wyant, Applied Optics, vol. 24, No. 6, Mar. 15, 1985, pp. 804-806.
“Distance measurement by the wavelength shift of laser diode light”, H. Kikuta, K. Iwata, and R. Nagata, Applied Optics, vol. 25, No. 17, Sep. 1, 1986, pp. 2976-2980.
“Interferometer for measuring displacement and distance”, T. Kubota, M. Nara, and T. Yoshino, Optics Letters, vol. 12, No. 5, May 1987, pp. 310-312.
“Three-color laser-diode interferometer”, P. de Groot, Applied Optics, vol. 30, No. 25, Sep. 1, 1991, pp. 3612-3616.
“Wavelength-shift interferometry for distance measurements using the Fourier transform technique for fringe analysis”, M. Suematsu and M. Takeda, Applied Optics, vol. 30, No. 28, Oct. 1, 1991, pp. 4046-4055.
“Three-dimensional lensless imaging using laser frequency diversity”, J.C. Marron and K.S. Schroeder, Applied Optics, vol. 31, No. 2, Jan. 10, 1992, pp. 255-262.
“Holographic laser radar”, J.C. Marron and K.S. Schroeder, Optics Letters, vol. 18, No. 5, Mar. 1, 1993, pp. 385-387.
“Use of a opacity constraint in three-dimensional imaging”, R.G. Paxman, J.H. Seldin, J.R. Fienup, and J.C, Marron, in proceedings of the SPIE Conference on Inverse Optics III, Orlando, Florida, Apr. 1994.
“Applications of Tunable Lasers to Laser Radar and 3D Imaging”, L.G. Shirley and G.R. Hallerman, Technical Report 1025, Lincoln Laboratory, MIT, Lexington, Massachusets, Feb. 26, 1996.
“Wavelength scanning profilometry for real-time surface shape measurement”, S. Kuwamura and I. Yamaguchi, Applied Optics. vol. 36, No. 19, Jul. 1, 1997, pp. 4473-4482.
“Three-dimensional imaging using a tunable laser source”, J.C. Marron and K.W. Gleichman, Optical Engineering 39(1) 47-51, Jan. 2000, pp. 47-51.
“Spectrally narrow pulsed dye laser without beam expander”, M.G. Littman and H.J. Metcalf, Applied Optics. vol. 17, No. 14, Jul. 15, 1978, pp. 2224-2227.
“A simple extended-cavity diode laser”, A.S. Arnold, J.S. Wilson, and M.G. Boshier, Review of Scientific Instruments, vol. 69, No. 3, Mar. 1998, pp. 1236-1239.
“External-cavity diode laser using a grazing-incidence diffraction grating”, K.C. Harvey and C.J. Myatt, Optics Letters, vol. 16, No. 12, Jun. 15, 1991, pp. 910-912.
“Novel geometry for single-mode scanning of tunable lasers”, K Liu and M.G. Littman, Optics Letters, vol. 6, No. 3, Mar. 1981, pp. 117-118.
“External-cavity frequency-stabilization of visible and infrared semiconductor lasers for high resolution spectroscopy”, M.G. Boshier, D. Berkeland, E.A. Hinds, and V. Sandoghar, Optics Communications 85, Sep. 15, 1991, pp. 355-359.
“Widely Tunable External Cavity Diode Lasers”, T. Day, M. Brownell, and I-Fan Wu, New Focus, Inc., 1275 Reamwood Avenue, Sunnydale, California.
“Littrow configuration tunable external cavity diode laser with fixed direction output beam”, C.J. Hawthorn, K.P. Weber and R.E. Scholten, Review of Scientific Instruments, vol. 72, No. 12, Dec. 2001, pp. 4477-4479.
“Fizeau Interferometer”, D. Malarcara, editor,Optical Shop Testing, New York, Wiley, 1978, pp. 19-24.
“Burch's Interferometer Employing Two Matched Scatter Plates”, D. Malarcara, editor,Optical Shop Testing, New York, Wiley, 1978, pp. 82-84.
“Holographic contouring by using tunable lasers”, N. George and W. Li, Optics Letters, vol. 19, No. 22, Nov. 15, 1994, pp. 1879-1881.
“Use of a multimode short-external-cavity laser diode for absolute-distance intererometry”, P. de Groot, Applied Optics, vol. 32, No. 22, Aug. 1, 1993, pp. 4193-4198.
“Three-dimensional sensing of rough surfaces by coherence radar”, T. Dresel, G. Hausler, and H. Venzke, Applied Optics, vol. 31, No. 7, Mar. 1, 1992, pp. 919-925.
Littrow-Laser web site sacher.de/littrow.htm, Apr. 7, 2002.
“Tunable Diode Lasers—Stand up to Research and Commercial Applications”, B. Shine, Laser Product Line Manager, New Focus, Inc., originally published in Photonics Spectra, Jan. 1992, pp. 102.
“Scatter Fringes of Equal Thickness”, J.M. Burch, Nature, vol. 17, May 16, 1953, pp. 889-890.
“Scatter-Fringe Interferometry”, J.M. Burch, J. Opt. Soc. Am. 52, 1962, pp. 600.
“Some Further Aspects of Scatter-Fringe Interferometry”, A.H. Shoemaker and M.V.R.K. Murty, Applied Optics, vol. 5, No. 4, Apr. 1966, pp. 603-607.
“Laser Speckle and Related Phenomena”, J.C. Dainty, editor, Springer-Verlag, Berlin, 1984.
“Digital Picture Processing”, A. Rosenfeld, and A.C. Kak, vol. 1,. Academic Press. New York. 1982.
Connolly Patrick J.
Harter Secrest, LLP
Light Gage, Inc
Ryan Thomas B.
Shaw Esq. Brian B.
LandOfFree
Common-path frequency-scanning interferometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Common-path frequency-scanning interferometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Common-path frequency-scanning interferometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3622932