Common optical path interferometric gauge

Details Common optical path interferometric gauge Common optical path interferometric gauge

1985-09-03

1986-12-09

LaRoche, Eugene R.

Optics: measuring and testing

By particle light scattering

With photocell detection

356345, 356358, G01B 902

Patent

active

046277315

ABSTRACT:
A common optical path interferometric gauge comprises an optical beam that is split into two beams. Both beams are modulated and recombined after introducing an optical path length difference greater than the coherence length of the optical source. The combined beam is guided along a common optical path and is subsequently split into reference and measurement beams. The measurement beam is guided along a measurement optical path that includes a moving workpiece surface. Both beams are recombined after interposing an optical path length difference therebetween so as to reestablish coherence between portions thereof, producing optical interference indicative of the surface movement.

REFERENCES:
patent: 3812496 (1974-05-01), Brooks
patent: 3877813 (1975-04-01), Hayes et al.
patent: 4013366 (1977-03-01), Philbert
patent: 4368981 (1983-01-01), Ozeki

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