Combustive destruction of halogenated compounds

Details Combustive destruction of halogenated compounds Combustive destruction of halogenated compounds

1994-07-25

1996-04-23

Lewis, Michael

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

423210, 4232453, 588213, 588234, 588245, 431 5, 431 7, F23D 1412, F23G 706, B01D 5364, B01D 5370

Patent

active

055100937

ABSTRACT:
The disposal of troublesome substances, especially global-warming halogenated compounds is difficult enough, but is particularly difficult when associated with particulate-forming matter, such as silane and arsine commonly encountered in waste gas streams of the semiconductor industry. The combustive destruction of the troublesome substances in such a waste gas stream is simply and successfully achieved by injecting the stream admixed with fuel gas into a combustion zone surrounded by the radiant surface of a foraminous gas burner that is separately fed fuel gas and excess air sufficient to burn all the combustibles entering the combustion zone. A simple apparatus integrates the combustion zone with a quenching zone for the combustion product stream.

REFERENCES:
patent: 3840344 (1974-10-01), Garbo
patent: 4048290 (1977-09-01), Lee
patent: 4206711 (1980-06-01), Konrad
patent: 4801437 (1989-01-01), Konagaya et al.
patent: 4828481 (1989-05-01), Weil et al.
patent: 5183646 (1993-02-01), Anderson et al.
patent: 5211552 (1993-05-01), Krill et al.

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