Combustion – Flame holder having protective flame enclosing or flame... – Tubular member delineates flame
Reexamination Certificate
1998-04-13
2001-05-22
Lazarus, Ira S. (Department: 3743)
Combustion
Flame holder having protective flame enclosing or flame...
Tubular member delineates flame
C431S005000, C431S007000, C110S238000, C422S168000
Reexamination Certificate
active
06234787
ABSTRACT:
TECHNICAL FIELD
The present invention relates to a combustion type detoxifying apparatus, more particularly to the structure of a combustion chamber in a gas treating apparatus for detoxifying toxic components such as toxic gases, combustible gases and corrosive gases which are contained in raw gases such as exhaust gases to be exhausted from systems for producing semiconductors or LCDs by allowing such components to burn or undergo pyrolysis.
BACKGROUND ART
Since gases containing combustible or combustion-assisting toxic components are exhausted as exhaust gases from systems for producing semiconductors or LCDs, these exhaust gases should be subjected to treatments for removing such toxic components (detoxifying treatment) before they are exhausted. A combustion type detoxifying apparatus is known as an apparatus for carrying out such detoxifying treatment of exhaust gases.
This combustion type detoxifying apparatus, which carries out detoxifying treatment by allowing various kinds of toxic components contained in an exhaust gas to burn or undergo pyrolysis, has a structure in which the exhaust gas, a combustion assisting gas, etc. injected through a burner into a combustion chamber are burned.
Powdery solid oxides are formed occasionally when exhaust gases are subjected to combustion treatment in this combustion type detoxifying apparatus, and the solid oxides formed deposit on the inner surface of the combustion chamber to be liable to affect the combustion treatment.
Accordingly, the conventional combustion chambers are allowed to have large capacities compared with the amounts of exhaust gases to be treated so as to reduce the influence of the deposit or are provided with means for mechanically scraping off the solid oxides deposited.
However, the increase in the size of the combustion chamber leads to rise in the equipment cost and enlargement of the apparatus inconveniently. Further, in the case where the combustion chamber is provided with the scraping means, the constitution of the apparatus is complicated, leading not only to further increase in the equipment cost but also to difficulties in the maintenance of the apparatus.
It is an objective of the present invention to provide a combustion type detoxifying apparatus which can securely prevent powders of solid oxides and the like from depositing on the inner surface of the combustion chamber at a low cost.
DISCLOSURE OF THE INVENTION
In the combustion type detoxifying apparatus according to the present invention, which carries out detoxifying treatment of a raw gas containing toxic components injected through a burner into a combustion chamber by allowing the toxic components to burn or undergo pyrolysis, the combustion chamber has a double-wall structure consisting of an outer barrel and an inner barrel which is made of a porous material, and the combustion chamber also has gas introducing means for introducing a pressure gas to the space defined between the outer barrel and the inner barrel.
According to this constitution, since the pressure gas introduced to the space defined between the outer barrel and the inner barrel bursts into the combustion chamber through the pores of the porous material constituting the inner barrel, the bursting power of the pressure gas prevents solid oxides and other powders occurring during combustion treatment of the raw gas from depositing on the inner surface of the inner barrel. Thus, deposition of powders such as solid oxides on the inner surface of the combustion chamber can be prevented inexpensively by use of a simple structure without requiring a large installation space, and detoxifying treatment can be carried out in a stable state over an extended period.
The improved combustion chamber according to the present invention is further provided with liquid supply means for supplying a liquid to the inner surface of the inner barrel. Thus, since powders depositing at welded portions and the like in the combustion chamber can be removed easily, there is substantially no need of disassembling the apparatus for removing the powders, and the maintenance cost can be reduced on a great margin.
Further, according to the present invention, a raw gas introducing passage for introducing a raw gas to the burner has a branch passage which is provided with detoxification treatment means, and a selector valve, which carries out selection between the passage to the burner and the passage to the detoxification treatment means, is disposed at a junction of the raw gas introducing passage and the branch passage. According to this constitution, since detoxifying treatment of the raw gas can be carried on even when the detoxifying treatment in the combustion chamber is interrupted, the operation of the raw gas supply source such as a semiconductor producing system need not be stopped, avoiding occurrence of defectives and reduction of productivity.
Meanwhile, according to the present invention, since a detoxifying column packed with a detoxifying agent which carries out detoxifying treatment of the toxic components under treatment by means of adsorption and the like is used as the detoxification treatment means, not only the equipment cost and the running cost can be reduced, but also the space for installing the detoxifying treatment means can be minimized. Such detoxifying column can be easily attached to existing equipments.
Further, the apparatus according to the present invention is provided with a purge gas introducing passage for purging the raw gas remaining in the burner and combustion chamber toward the detoxification treatment means. Thus, since toxic components and combustible components in the burner and combustion chamber can be purged without stopping the operation of the raw gas supply source such as a semiconductor producing system, no toxic component is released even when the burner and the combustion chamber are disassembled for inspection, and operators can work safely.
REFERENCES:
patent: 319270 (1885-06-01), Lanyon
patent: 1624865 (1927-04-01), Freel
patent: 1796878 (1931-03-01), Watson
patent: 2655455 (1953-10-01), Steele
patent: 3875874 (1975-04-01), Altmann
patent: 4402738 (1983-09-01), Akio
patent: 4438706 (1984-03-01), Boday et al.
patent: 4509434 (1985-04-01), Boday et al.
patent: 4555389 (1985-11-01), Soneta et al.
patent: 4768949 (1988-09-01), Goodfellow
patent: 4974530 (1990-12-01), Lyon
patent: 5181475 (1993-01-01), Breen et al.
patent: 5588381 (1996-12-01), Jennebach et al.
patent: 5603905 (1997-02-01), Bartz et al.
patent: 5693293 (1997-12-01), Reichardt et al.
patent: 5724901 (1998-03-01), Guy et al.
patent: 5749720 (1998-05-01), Fukuda et al.
patent: 5759498 (1998-06-01), Sheu et al.
patent: 5800792 (1998-09-01), Ibaraki et al.
patent: 5855742 (1999-01-01), Lumbroso et al.
patent: 5938422 (1999-08-01), Smith et al.
patent: 0 160 524 (1985-06-01), None
patent: 63-62528 (1988-03-01), None
patent: 2-68414 (1990-03-01), None
patent: 2-103311 (1990-04-01), None
patent: 2-126014 (1990-05-01), None
Endoh Fumitaka
Koseki Shuichi
Miyake Shinichi
Nitta Akihiko
Sugimori Yoshiaki
Armstrong Westerman Hattori McLeland & Naughton LLP
Lazarus Ira S.
Lee David
Nippon Sanso Corporation
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