Combustion – Process of combustion or burner operation – Burning waste gas – e.g. – furnace gas – etc.
Patent
1998-04-13
1999-09-28
Lazarus, Ira S.
Combustion
Process of combustion or burner operation
Burning waste gas, e.g., furnace gas, etc.
431187, 431353, 431243, F23D 1420
Patent
active
059576782
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a combustion type detoxifying apparatus, more particularly to a gas treating apparatus for detoxifying toxic components such as toxic gases, combustible gases and corrosive gases which are contained in raw gases such as exhaust gases to be exhausted from systems for producing semiconductors or LCDs by allowing such components to burn or undergo pyrolysis.
Since gases containing combustible or combustion-assisting toxic components are exhausted as exhaust gases from systems for producing semiconductors or LCDs, these exhaust gases should be subjected to treatments for removing such toxic components (detoxifying treatment) before they are exhausted. A combustion type detoxifying apparatus is known as an apparatus for carrying out such detoxifying treatment of exhaust gases.
This combustion type detoxifying apparatus carries out a detoxifying treatment by allowing various kinds of toxic components contained in an exhaust gas to burn or undergo pyrolysis using a burner provided in a combustion chamber, and a multi-wall pipe type burner consisting of nozzles for injecting an exhaust gas, a combustion assisting gas, etc., which are arranged concentrically, is usually employed as the burner.
As such a multi-wall pipe type burner, there is employed a quadruple-wall pipe type burner consisting of an exhaust gas nozzle for injecting the exhaust gas, which is located at the center, a lift gas nozzle for injecting a lift gas for lifting flames to be formed at the nozzle tip, which is arranged to surround the exhaust gas nozzle, an exhaust gas combustion assisting gas nozzle for injecting a gas for assisting combustion of combustible components in the exhaust gas, which is arranged to surround the lift gas nozzle, and a combustion nozzle for injecting a mixed gas of a fuel gas and a combustion assisting gas, which is arranged to surround the exhaust gas combustion assisting gas nozzle.
However, a problem in this quadruple-wall pipe type burner is that flames of the burner can flash back, since a fuel gas and a combustion assisting gas which are to be injected from the combustion nozzle are mixed at an appropriate rate beforehand, and the resulting mixed gas is supplied to the burner. Accordingly, it is necessary to incorporate an equipment and the like for preventing such flash-back, which increases costs.
Under such circumstances, an objective of the present invention is to provide a combustion type detoxifying apparatus equipped with a multi-wall pipe type burner having a structure which can give a stable combustion state without causing flash-back.
DISCLOSURE OF THE INVENTION
In the combustion type detoxifying apparatus according to the present invention, which carries out detoxification of a raw gas containing toxic components injected through a burner into a combustion chamber by allowing the toxic components to burn or undergo pyrolysis, the burner is a multi-wall pipe type burner having a raw gas nozzle for injecting the raw gas, a lift gas nozzle for injecting an inert gas formed to surround the raw gas nozzle, a raw gas combustion assisting gas nozzle for injecting a gas for assisting combustion of combustible components in the raw gas formed to surround the lift gas nozzle, a fuel gas combustion assisting gas nozzle for injecting a gas for assisting combustion of a fuel gas formed to surround the raw gas combustion assisting gas nozzle, and a fuel gas nozzle for injecting the fuel gas.
Incidentally, either the fuel gas combustion assisting gas nozzle or the fuel gas nozzle may be located inside the other.
According to this constitution, since the fuel gas combustion assisting gas and the fuel gas are injected from different nozzles respectively, flash-back can be prevented from occurring at the burner using a simple structure, and a combustion detoxifying treatment of an exhaust gas can be carried out safely in a stable state.
Further, according to the present invention, since the burner is attached to the combustion chamber via a pre-combustion chamber hav
REFERENCES:
patent: 4443228 (1984-04-01), Schlinger
patent: 4801437 (1989-01-01), Konagaya et al.
patent: 5123836 (1992-06-01), Yoneda et al.
patent: 5308239 (1994-05-01), Bazarian et al.
Endoh Fumitaka
Koseki Shuichi
Miyake Shinichi
Nitta Akihiko
Suwa Toshio
Lazarus Ira S.
Nippon Sanso Corporation
Raab Sara
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