Combined wet and dry etching process for micromachining of...

Details Combined wet and dry etching process for micromachining of... Combined wet and dry etching process for micromachining of...

2005-04-26

2005-04-26

Healy, Brian M. (Department: 2883)

Optical waveguides

Integrated optical circuit

C385S129000, C385S088000, C385S092000, C257S466000, C257S622000

Reexamination Certificate

active

06885786

ABSTRACT:
A novel micromachining method in which dry etching and anisotropic wet etching are combined.

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