Combined vacuum baffle and valve for diffusion pump

Details Combined vacuum baffle and valve for diffusion pump Combined vacuum baffle and valve for diffusion pump

1976-03-04

1978-03-28

Freeh, William L.

Pumps

One fluid pumped by contact or entrainment with another

Jet

F04F 900

Patent

active

040812227

ABSTRACT:
In a vacuum system a baffle-valve acts first as a baffle to reduce the backstreaming of a diffusion pump fluid into the main vacuum chamber being evacuated and secondly it can be used as a valve to provide complete isolation between the diffusion pump and the vacuum chamber. This enables the chamber to be open for service work while the diffusion pump is kept operating for rapid pump down. The foregoing dual use of the baffle/valve increases pumping efficiency because of higher conductance.

REFERENCES:
patent: 3122896 (1964-03-01), Hickey
patent: 3224665 (1965-12-01), Milleron et al.
patent: 3649339 (1972-03-01), Smith
patent: 3697195 (1972-10-01), Johnson et al.
patent: 3829244 (1974-08-01), Miller
patent: 3876337 (1975-04-01), Landfors

Affiliated with

Also associated with

Rating

Combined vacuum baffle and valve for diffusion pump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Combined vacuum baffle and valve for diffusion pump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Combined vacuum baffle and valve for diffusion pump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-640415