Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1994-09-30
1996-07-16
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257433, 257443, 257448, 257466, 2502061, 2502086, 250237R, H01L 310232
Patent
active
055369642
ABSTRACT:
A thin-film semiconductor pinhole component with monolithically integrated position-sensing photodetectors is herein referred to as a Position Sensitive Pinhole (PSP). Another embodiment is also discussed where a PSP is integrated onto a platform with controllable motion and is herein referred to as a Movable Position Sensitive Pinhole (MPSP). A third embodiment describes the MPSP with capacitive, electrostatic actuation incorporated into the device to achieve controlled motion, herein referred to as a Capacitively Actuated Movable Position Sensitive Pinhole (CAMPSP). Each of those embodiments of the present invention are discussed, as are their method of manufacture and use in a laser environment as a spatial filter.
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Green Evan D. H.
Haniff Tario M.
Hu Albert K.
Jones Allston L.
Mintel William
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