Combined semiconductor thin film pinhole and semiconductor photo

Details Combined semiconductor thin film pinhole and semiconductor photo Combined semiconductor thin film pinhole and semiconductor photo

1996-06-19

1997-12-16

Niebling, John

Fishing, trapping, and vermin destroying

437 2, H01L 2714

Patent

active

056984537

ABSTRACT:
A thin-film semiconductor pinhole component with monolithically integrated position-sensing photodetectors is herein referred to as a Position Sensitive Pinhole (PSP). Another embodiment is also discussed where a PSP is integrated onto a platform with controllable motion and is herein referred to as a Movable Position Sensitive Pinhole (MPSP). A third embodiment describes the MPSP with capacitive, electrostatic actuation incorporated into the device to achieve controlled motion, herein referred to as a Capacitively Actuated Movable Position Sensitive Pinhole (CAMPSP). Each of those embodiments of the present invention are discussed, as are their method of manufacture and use in a laser environment as a spatial filter.

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