Combined radio frequency and hall effect ion source and...

Radiant energy – Ion generation – Electron bombardment type

Reexamination Certificate

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C250S492210, C250S251000, C315S111610, C315S111510, C315S111710, C315S111410, C315S501000, C204S298040, C204S298030, C204S298080, C204S298060, C313S359100, C313S231310, C313S361100, C313S362100, C118S731000, C060S202000

Reexamination Certificate

active

07420182

ABSTRACT:
This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma accelerator for providing plasma discharge. A gas distributor introduces a gas into the plasma accelerator. A cathode emits electrons attracted to the anode for ionizing the gas and neutralizing ion flux emitted from the plasma accelerator. An electrical circuit coupled between the anode and the cathode having a DC power source provides DC voltage. A magnetic circuit structure including a magnetic field source establishes a transverse magnetic field in the plasma accelerator that creates an impedance to the flow of the electrons toward the anode to enhance ionization of the gas to create plasma and which in combination with the electric circuit establishes an axial electric field in the plasma accelerator. An RF power source provides RF power to at least one electrode disposed about and/or inside the plasma accelerator that induces current for ionizing the gas to create the plasma such that the axial electric field accelerates ions through the plasma accelerator to provide ion flux.

REFERENCES:
patent: 5581155 (1996-12-01), Morozov et al.
patent: 5859428 (1999-01-01), Fruchtman
patent: 6075321 (2000-06-01), Hruby
patent: 6150764 (2000-11-01), Hruby et al.
patent: 6293090 (2001-09-01), Olson
patent: 6486593 (2002-11-01), Wang et al.
patent: 6834492 (2004-12-01), Hruby et al.
patent: 2003/0184205 (2003-10-01), Johnson
U.S. Appl. No. 11/301,857, filed Dec. 13, 2005, Hruby et al.

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